公开(公告)号：EP1227327A3

公开(公告)日：2004-01-21

申请号：EP01402505.0

申请日：2001-09-28

申请人： FUJITSU LIMITED

发明人： Hiroshi, Ishikawa, c/o Fujitsu Limited ,  Atsushi, Machida, c/o Fujitsu Media Device Limited

IPC分类号： G01P15/10 ,  G01P15/08

CPC分类号： G01P15/097 ,  G01P15/0915

摘要： In an acceleration sensor (10) including a vibrator (1) subject to a sliding vibration and a weight section (2) connected to the vibrator (1) and supported at a position different from the position of the center of gravity of an assembly of the vibrator (1) and weight section (2), for detecting an angular moment about the support point, which is produced at the weight section (2) by application of acceleration, as sliding vibration with the vibrator (1), the acceleration sensor (10) includes a rectangular substrate (3) having a plurality of electrodes (6) electrically connected to the vibrator (1), a formation pattern of the plurality of electrodes (6) is symmetrical about an axis parallel to at least one side of the substrate (3), and the plurality of electrodes (6) have substantially equal thickness. Since the formation pattern of the electrodes (6) on the substrate (3) is symmetrical and the respective electrodes (6) have substantially equal thickness, the vibrator (1) that is bonded to this substrate (3) does not incline and the detection sensitivity does not vary.

摘要翻译： 在包括受到滑动振动的振动器（1）和连接到振动器（1）的重物部分（2）的加速度传感器（10）中，并且支撑在与组件的重心位置不同的位置 振动器（1）和重量部分（2），用于通过施加加速度来检测在重物部分（2）处产生的支撑点周围的角力矩作为与振动器（1）的滑动振动，加速度传感器 （10）包括具有电连接到所述振动器（1）的多个电极（6）的矩形基板（3），所述多个电极（6）的形成图案关于平行于至少一个 基板（3）和多个电极（6）的厚度基本相等。 由于基板（3）上的电极（6）的形成图案是对称的，并且各个电极（6）的厚度基本相等，所以结合到该基板（3）的振动器（1）不倾斜，检测 灵敏度不变。