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13 条记录 (耗时 0.022 秒)

    Micro-electro-mechanical-system (MEMS) driver
    1.
    发明公开
    Micro-electro-mechanical-system (MEMS) driver 有权
    MEMS-二极管驱动器

    公开(公告)号：EP2650642A2

    公开(公告)日：2013-10-16

    申请号：EP13001917.7

    申请日：2013-04-12

    申请人： Fairchild Semiconductor Corporation

    发明人： Tao, Hai ,  Opris, Ion

    IPC分类号： G01C19/5776

    CPC分类号： H03L7/183 ,  G01C19/5656 ,  G01C19/5776 ,  H03B5/30 ,  H03H2009/02283

    摘要： In an example, a driver for a micro-electro-mechanical-system (MEMS) device can include a first input configured to receive a first command signal including an oscillatory command signal, a second input configured to receive a second command signal including a bias command signal, and an amplifier configured to receive a high voltage supply, to provide, to the MEMS device, a closed-loop output signal responsive to both the first command signal and the second command signal in a first state, and to provide an open loop output signal configured to substantially span a voltage range of the high voltage supply in a second state.

    摘要翻译： 在一个示例中，用于微电子机械系统（MEMS）装置的驱动器可以包括被配置为接收包括振荡指令信号的第一命令信号的第一输入，被配置为接收包括偏置的第二命令信号的第二输入 以及被配置为接收高电压电源的放大器，以在第一状态下响应于第一命令信号和第二命令信号向MEMS装置提供闭环输出信号，并且提供开路 环路输出信号被配置为在第二状态下基本跨越高压电源的电压范围。

    MEMS device quadrature phase shift cancellation
    3.
    发明授权
    MEMS device quadrature phase shift cancellation 有权

    公开(公告)号：EP2647955B1

    公开(公告)日：2018-10-31

    申请号：EP13001719.7

    申请日：2013-04-04

    申请人： Fairchild Semiconductor Corporation

    发明人： Opris, Ion ,  Tao, Hai ,  Lee, Shungneng

    IPC分类号： G01C19/5776 ,  G01C19/5726

    CPC分类号： G01C25/00 ,  G01C19/5726 ,  G01C19/5776

    摘要： This document discusses, among other things, apparatus and methods for quadrature cancellation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus (200) can include a drive charge-to-voltage C2V converter (202) configured to provide drive information of a proof mass of a MEMS gyroscope, a sense C2V converter (203) configured to provide sense information of the proof mass, a phase-shift module (205) configured to provide phase shift information of the drive information, a drive demodulator (210) configured to receive the drive information and the phase shift information and to provide demodulated drive information, a sense demodulator (211) configured to receive the sense information and the phase shift information and to provide demodulated sense information, and wherein the quadrature correction apparatus (200) is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information.

    MEMS quadrature cancellation and signal demodulation
    5.
    发明公开
    MEMS quadrature cancellation and signal demodulation 审中-公开
    MEMS正交拆除和信号解调

    公开(公告)号：EP2650643A3

    公开(公告)日：2016-01-06

    申请号：EP13001918.5

    申请日：2013-04-12

    申请人： Fairchild Semiconductor Corporation

    发明人： Tao, Hai ,  Opris, Ion

    IPC分类号： G01C19/5776

    摘要： In certain examples, a quadrature cancellation apparatus can include a drive charge amplifier configured to couple to a proof mass of a MEMS device and to provide oscillation motion information, a first sense charge amplifier configured to couple to the proof mass and to provide first sense information of a first movement of the MEMS device, a first programmable amplifier configured to receive the oscillation motion information and provide amplified oscillation motion information, a first summer configured to cancel quadrature error of the first sense information using the first sense information and the amplified oscillation motion information to provide quadrature-corrected first sense information, a phase shifter configured to receive the oscillation motion information and to provide carrier information, and a first multiplier configured to provide demodulated first sense information using the quadrature-corrected first sense information and the carrier information.

    Mems device automatic-gain control loop for mechanical amplitude drive
    6.
    发明公开
    Mems device automatic-gain control loop for mechanical amplitude drive 有权
    用于MEMS装置的机械驱动振幅自动增益控制环路

    公开(公告)号：EP2647952A3

    公开(公告)日：2015-09-23

    申请号：EP13001720.5

    申请日：2013-04-04

    申请人： Fairchild Semiconductor Corporation

    发明人： Opris, Ion ,  Tao, Hai ,  Lee, Shungneng

    IPC分类号： G01C19/5726

    CPC分类号： G01C25/00 ,  G01C19/5726

    摘要： This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver (107, 207, 307) configured to oscillate a proof mass of a MEMS device, a charge-to-voltage (C2V) (105, 205, 305) converter configured to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) (312) configured to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.

    MEMS quadrature cancellation and signal demodulation
    7.
    发明公开
    MEMS quadrature cancellation and signal demodulation 审中-公开
    MEMS-Quadratur-Abbruch und Signaldemodulation

    公开(公告)号：EP2650643A2

    公开(公告)日：2013-10-16

    申请号：EP13001918.5

    申请日：2013-04-12

    申请人： Fairchild Semiconductor Corporation

    发明人： Tao, Hai ,  Opris, Ion

    IPC分类号： G01C19/5776

    摘要： In certain examples, a quadrature cancellation apparatus can include a drive charge amplifier configured to couple to a proof mass of a MEMS device and to provide oscillation motion information, a first sense charge amplifier configured to couple to the proof mass and to provide first sense information of a first movement of the MEMS device, a first programmable amplifier configured to receive the oscillation motion information and provide amplified oscillation motion information, a first summer configured to cancel quadrature error of the first sense information using the first sense information and the amplified oscillation motion information to provide quadrature-corrected first sense information, a phase shifter configured to receive the oscillation motion information and to provide carrier information, and a first multiplier configured to provide demodulated first sense information using the quadrature-corrected first sense information and the carrier information.

    摘要翻译： 在某些示例中，正交消除装置可以包括被配置为耦合到MEMS器件的校准质量块并提供振荡运动信息的驱动电荷放大器，被配置为耦合到校准质量块并提供第一感测信息的第一感测电荷放大器 所述第一可编程放大器被配置为接收所述振荡运动信息并提供放大的振荡运动信息;第一加法器，被配置为使用所述第一检测信息和所述放大的振荡运动来消除所述第一检测信息的正交误差 用于提供正交校正的第一感测信息的信息;被配置为接收振荡运动信息并提供载波信息的移相器，以及配置为使用正交校正的第一感测信息和载波信息来提供解调的第一感测信息的第一乘法器。

    MEMS device quadrature phase shift cancellation
    8.
    发明公开
    MEMS device quadrature phase shift cancellation 审中-公开
    MEMS-Vorrichtung mitQuadraturphasnechiebungsauslöschung

    公开(公告)号：EP2647955A2

    公开(公告)日：2013-10-09

    申请号：EP13001719.7

    申请日：2013-04-04

    申请人： Fairchild Semiconductor Corporation

    发明人： Opris, Ion ,  Tao, Hai ,  Lee, Shungneng

    IPC分类号： G01C19/5776

    CPC分类号： G01C25/00 ,  G01C19/5726 ,  G01C19/5776

    摘要： This document discusses, among other things, apparatus and methods for quadrature cancellation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus (200) can include a drive charge-to-voltage C2V converter (202) configured to provide drive information of a proof mass of a MEMS gyroscope, a sense C2V converter (203) configured to provide sense information of the proof mass, a phase-shift module (205) configured to provide phase shift information of the drive information, a drive demodulator (210) configured to receive the drive information and the phase shift information and to provide demodulated drive information, a sense demodulator (211) configured to receive the sense information and the phase shift information and to provide demodulated sense information, and wherein the quadrature correction apparatus (200) is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information.

    摘要翻译： 本文件尤其讨论了用于从诸如MEMS陀螺仪的微机电系统（MEMS）装置正交消除感测信息的装置和方法。 在某些示例中，正交校正装置（200）可以包括被配置为提供MEMS陀螺仪的证明质量的驱动信息的驱动电荷到电压C2V转换器（202），感测C2V转换器（203），被配置为提供有意义的 检测质量信息，被配置为提供驱动信息的相移信息的移相模块（205），被配置为接收驱动信息和相移信息并提供解调的驱动信息的驱动解调器（210） 感测解调器（211），被配置为接收感测信息和相移信息并提供解调的感测信息，并且其中正交校正装置（200）被配置为使用解调的驱动信息和解调的感测信息来提供校正的感测信息。

    MEMS device quadrature phase shift cancellation
    10.
    发明公开
    MEMS device quadrature phase shift cancellation 审中-公开
    用正交相移抵消MEMS装置

    公开(公告)号：EP2647955A3

    公开(公告)日：2014-07-23

    申请号：EP13001719.7

    申请日：2013-04-04

    申请人： Fairchild Semiconductor Corporation

    发明人： Opris, Ion ,  Tao, Hai ,  Lee, Shungneng

    IPC分类号： G01C19/5776 ,  G01C19/5726

    CPC分类号： G01C25/00 ,  G01C19/5726 ,  G01C19/5776

    摘要： This document discusses, among other things, apparatus and methods for quadrature cancellation of sense information from a micro-electromechanical system (MEMS) device, such as a MEMS gyroscope. In certain examples, a quadrature correction apparatus (200) can include a drive charge-to-voltage C2V converter (202) configured to provide drive information of a proof mass of a MEMS gyroscope, a sense C2V converter (203) configured to provide sense information of the proof mass, a phase-shift module (205) configured to provide phase shift information of the drive information, a drive demodulator (210) configured to receive the drive information and the phase shift information and to provide demodulated drive information, a sense demodulator (211) configured to receive the sense information and the phase shift information and to provide demodulated sense information, and wherein the quadrature correction apparatus (200) is configured to provide corrected sense information using the demodulated drive information and the demodulated sense information.