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公开(公告)号:EP2013632A2
公开(公告)日:2009-01-14
申请号:EP07755797.3
申请日:2007-04-19
申请人: FormFactor, Inc.
IPC分类号: G01R31/02
CPC分类号: G01R31/312 , G01R1/06727 , G01R1/06744 , G01R1/07342 , G01R3/00
摘要: A probe apparatus can include a substrate, a contact structure attached to the substrate, and an electronic component electrically connected to the contact structure. The electronic component can be attached to the contact structure.