公开(公告)号：EP1904861A2

公开(公告)日：2008-04-02

申请号：EP06774597.6

申请日：2006-07-07

申请人： FormFactor, Inc.

发明人： ELDRIDGE, Benjamin, N. ,  SAEKI, Takao ,  KAWAMATA, Nobuhiro ,  REYNOLDS, Carl, V.

IPC分类号： G01R31/02

CPC分类号： G01R1/07364 ,  G01R1/07378

摘要： A probe card assembly can include an insert holder configured to hold a probe insert, which can include probes disposed in a particular configuration for probing a device to be tested. The probe card assembly can provide an electrical interface to a tester that can control testing of the device, and while attached to the probe card assembly, the insert holder can hold the probe insert such that the probe insert is electrically connected to electrical paths within the probe card assembly that are part of the interface to the tester. The probe insert of the probe card assembly can be replaced by detaching the insert holder, replacing the probe insert with a new probe insert, and then reattaching the insert holder to the probe card assembly. The probe insert and holder can be integrally formed and comprise a single structure that can be detached from a probe card assembly and replaced with a different probe insert and holder.

公开(公告)号：EP2092356A2

公开(公告)日：2009-08-26

申请号：EP07865067.8

申请日：2007-11-30

申请人： FormFactor, Inc.

发明人： ELDRIDGE, Benjamin N. ,  REYNOLDS, Carl V. ,  SAEKI, Takao ,  URAKAWA, Yoichi

IPC分类号： G01R31/02

CPC分类号： G01R1/18 ,  G01R1/07307 ,  G01R31/2889

摘要： probing apparatus can comprise a substrate, conductive signal traces, probes, and electromagnetic shielding. The substrate can have a first surface and a second surface opposite the first surface, and the electrically conductive first signal traces can be disposed on the first surface of the first substrate. The probes can be attached to the first signal traces, and the electromagnetic shielding structures can be disposed about the signal traces.