-
公开(公告)号:EP1300619A1
公开(公告)日:2003-04-09
申请号:EP00935552.0
申请日:2000-06-05
发明人: OHMI, Tadahiro , NISHINO, Kouji Fujikin Incorporated , IKEDA, Nobukazu Fujikin Incorporated , YAMAJI, Michio Fujikin Incorporated , DOHI, Ryousuke Fujikin Incorporated , IDETA, Eiji Fujikin Incorporated , HIROSE, Takashi Fujikin Incorporated
IPC分类号: F16K47/08
CPC分类号: F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要: It is an object of the present invention to provide at low costs a valve with an integral orifice for use in a gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling.
To realize the objects of the present invention, the main part of the valve with an integral orifice comprises a valve main body made of heat-resisting materials having a gas inflow passage in communication with a valve chamber with an upper open end and a gas outflow passage, a synthetic resin made valve seat body formed in the valve chamber and having a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably installed in the gas outflow passage of the valve seat body, and an orifice formed in the orifice disc to reduce the gas outflow passage of the valve seat body; wherein the orifice is formed in the stainless steel made orifice disc in advance and the metal made orifice disc with the orifice formed by a separate processing and the synthetic resin made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via the metal inner disc.-
公开(公告)号:EP1486714B1
公开(公告)日:2008-08-27
申请号:EP02705285.1
申请日:2002-03-18
发明人: OHMI, Tadahiro , YAMAJI, Michio Fujikin Incorporated , NOJIMA, Shinya Fujikin Incorporated , KATSUMI, Yukito Fujikin Incorporated , SHINOHARA, Tsutomu Fujikin Incorporated
CPC分类号: F16J15/02 , F16J15/062 , F16J15/104 , F16L19/00 , F16L19/0212 , F16L19/0218 , F16L25/0018 , F16L27/082 , F16L27/0828 , Y10S277/925 , Y10S285/917
摘要: At the abutting end faces of coupling members (1, 2), annular recesses (3, 4) having annular protrusions (5, 6) on the bottom face are provided while surrounding fluid channels (1a, 2a). A gasket (10) comprises a seal part (11) interposed between the protrusions (5, 6) of the coupling members (1, 2) while having an outside diameter smaller than the diameter of the annular recesses (3, 4), and a guide part (12) disposed on the outside of the seal part (11) while having an outside diameter being fitted in the annular recesses (3, 4). When the coupling members (1, 2) are fastened properly, the end faces thereof abut each other. An annular groove (14) is made in the outer circumference of the seal part (11) and a snap ring (13) fitted in the annular groove (14) couples the seal part (11) and the guide part (12).
-
公开(公告)号:EP1300619B1
公开(公告)日:2006-08-02
申请号:EP00935552.0
申请日:2000-06-05
发明人: OHMI, Tadahiro , NISHINO, Kouji Fujikin Incorporated , IKEDA, Nobukazu Fujikin Incorporated , YAMAJI, Michio Fujikin Incorporated , DOHI, Ryousuke Fujikin Incorporated , IDETA, Eiji Fujikin Incorporated , HIROSE, Takashi Fujikin Incorporated
IPC分类号: F16K47/08
CPC分类号: F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要: It is an object of the present invention to provide at low costs a valve with an integral orifice for use in a gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. To realize the objects of the present invention, the main part of the valve with an integral orifice comprises a valve main body made of heat-resisting materials having a gas inflow passage in communication with a valve chamber with an upper open end and a gas outflow passage, a synthetic resin made valve seat body formed in the valve chamber and having a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably installed in the gas outflow passage of the valve seat body, and an orifice formed in the orifice disc to reduce the gas outflow passage of the valve seat body; wherein the orifice is formed in the stainless steel made orifice disc in advance and the metal made orifice disc with the orifice formed by a separate processing and the synthetic resin made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via the metal inner disc.
-
公开(公告)号:EP1486714A1
公开(公告)日:2004-12-15
申请号:EP02705285.1
申请日:2002-03-18
发明人: OHMI, Tadahiro , YAMAJI, Michio Fujikin Incorporated , NOJIMA, Shinya Fujikin Incorporated , KATSUMI, Yukito Fujikin Incorporated , SHINOHARA, Tsutomu Fujikin Incorporated
CPC分类号: F16J15/02 , F16J15/062 , F16J15/104 , F16L19/00 , F16L19/0212 , F16L19/0218 , F16L25/0018 , F16L27/082 , F16L27/0828 , Y10S277/925 , Y10S285/917
摘要: Two coupling member 1, 2 are provided in respective butting end faces thereof with annular recessed portions 3, 4 surrounding respective fluid channels 1a, 2a thereof and having annular projections 5, 6 each formed in a bottom face of the recessed portion. A gasket 10 comprises a sealing portion 11 having an outside diameter smaller than the diameter of the recessed portions 3, 4 and positioned between the projections 5, 6 of the coupling members 1, 2, and a guide 12 having an outside diameter permitting the guide to be fitted into the recessed portions 3, 4 and positioned externally of the sealing portion 11. The butting end faces of the coupling members 1, 2 are movable into contact with each other when the coupling is tightened up properly. The sealing portion 11 has an annular groove 14 formed in an outer periphery thereof, and the sealing portion 11 and the guide 12 are connected together by a snap ring 13 fitted in the annular groove 14.
摘要翻译: 两个联接构件1,2在其各个对接端面上设置有围绕其各自的流体通道1a,2a的环形凹部3,4,并且具有形成在凹部的底面中的环形突起5,6。 垫圈10包括具有小于凹部3,4的直径的外径的密封部分11并且位于联接构件1,2的突起5,6之间,并且具有允许引导件的外径的引导件12 装配到凹部3,4中并且位于密封部分11的外部。当联接器适当地紧固时,联接构件1,2的对接端面可以彼此接触。 密封部分11具有形成在其外周中的环形槽14,并且密封部分11和引导件12通过装配在环形槽14中的卡环13连接在一起。
-
-
-