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    METHOD FOR REALIZING AN OPTICAL WAVEGUIDE IN A SUBSTRATE BY MEANS OF A FEMTOSECOND LASER
    3.
    发明公开
    METHOD FOR REALIZING AN OPTICAL WAVEGUIDE IN A SUBSTRATE BY MEANS OF A FEMTOSECOND LASER 有权
    VERFAHREN ZUR HERSTELLUNG EINES LICHTWELLENLEITERS IN EINEM SUBSTRAT MITTELS EINES FEMTOSEKUNDEN-LASERS

    公开(公告)号：EP2987011A1

    公开(公告)日：2016-02-24

    申请号：EP14728315.4

    申请日：2014-04-18

    申请人： Consiglio Nazionale Delle Ricerche ,  Sapienza Universita di Roma

    发明人： OSELLAME, Roberto ,  CRESPI, Andrea ,  CORRIELLI, Giacomo ,  SCIARRINO, Fabio

    IPC分类号： G02B6/13 ,  G02B6/126 ,  G02B6/10

    CPC分类号： G02B6/13 ,  B23K26/0057 ,  G02B6/105 ,  G02B6/125 ,  G02B6/126 ,  G02B2006/12171

    摘要： The invention regards a method for realizing a waveguide in a substrate by means of a femtosecond laser system, the waveguide having a birefringence axis at a predetermined angle for at least a segment, such method including: - preparing a substrate in which the waveguide has to be realized, such substrate including a free surface onto which the pulsed laser beam is impinging; - positioning an immersion lens (9) apt to focus the laser beam in the substrate (10); - introducing a first optical element (11); - making the laser beam impinge on the first optical element (11), which directs the laser beam towards the immersion lens (9); - focusing the femtosecond pulsed laser beam (F) at a given depth inside the substrate (10), in order to induce a refractive index change in a volume of said substrate around the focus, wherein the laser beam (F) propagates in the substrate along a direction, said focusing including making the laser beam impinge on said immersion lens (9) in a first position; - varying the propagation direction of the laser beam (F) in the substrate (10), maintaining the beam focused, translating or rotating the first optical element (11), in order to operate a translation of the laser beam, to modify the impinging position of the laser beam on the immersion lens (9), in order to reach a first propagation direction forming a first non-zero angle (Θt) with respect to the normal direction to the free surface of the substrate; - translating the laser beam focus with respect to the substrate (10) in order to create a first waveguide segment (GD), defined by adjacent volumes in which the refractive index has been modified, wherein the birefringence axis of the formed first waveguide segment (GD) is at said fixed angle, which is a function of the first angle (Θt) describing the reached first propagation direction of the laser beam in the substrate.

    摘要翻译： 公开了一种通过飞秒激光系统在基板中实现光波导的方法，该波导包括对至少一个部分倾斜预定角度的双折射轴。 该方法包括制备包括自由表面的衬底，将飞秒激光束聚焦到衬底中，以便引起围绕聚焦区域的这种衬底的体积的折射率修改。 该方法还包括改变飞秒激光束的传播方向以达到描述相对于衬底的自由表面的法线的预定非消失角的传播方向，并且相对于衬底平移聚焦区域， 以产生波导段。