公开(公告)号：EP1685394A2

公开(公告)日：2006-08-02

申请号：EP04794773.4

申请日：2004-10-12

申请人： GENERAL ELECTRIC COMPANY

发明人： SANDVIK, Peter, Micah ,  TILAK, Vinayak ,  TUCKER, Jesse ,  WEAVER, Stanton, Earl ,  SHADDOCK, David, Mulford ,  MALE, Jonathan, Lloyd ,  LEMMON, John, Patrick ,  WOODMANSEE, Mark, Allen ,  MANIVANNAN, Venkatesan ,  HAITKO, Deborah, Ann

IPC分类号： G01N27/414

CPC分类号： G01N27/4141 ,  G01N33/0037 ,  Y02A50/245

摘要： A gas sensor device including a semiconductor substrate; one or more catalytic gate-electrodes deposited on a surface of the semiconductor substrate; one or more ohmic contacts deposited on the surface of the semiconductor substrate and a passivation layer deposited on at least a portion of the surface; wherein the semiconductor substrate includes a material selected from the group consisting of silicon carbide, diamond, Group III nitrides, alloys of Group III nitrides, zinc oxide, and any combinations thereof.