A MOISTURE PROTECTION STRUCTURE FOR A DEVICE AND A FABRICATION METHOD THEREOF
    4.
    发明公开
    A MOISTURE PROTECTION STRUCTURE FOR A DEVICE AND A FABRICATION METHOD THEREOF 审中-公开
    防潮结构用于生产装置和工艺

    公开(公告)号:EP3004930A1

    公开(公告)日:2016-04-13

    申请号:EP13726712.6

    申请日:2013-05-24

    IPC分类号: G01T1/20 G01T1/24

    摘要: A moisture protection structure (10) used to protect a device (15) against moisture penetration. The device (15) has a first area (A1) at a first side (S1) for emitting or receiving radiation (RE;RR). The device (15) has a second side (S2) opposite to the first side (S1) attached to a supporting means (20). A lateral side (LS) of the device (15) is defined between a first perimeter delimiting the first area (A1) on the first side (S1) and a second perimeter delimiting a second area (A2) on the second side (S2). The moisture protection structure (10) includes at least one moisture-resistant layer (25) deposited on the first area (A1) and the lateral side (LS) of the device (15) and a moisture-resistant cover (30) arranged to cover the at least one moisture-resistant layer (25) at the first side (S1). The moisture-resistant cover (30) and the at least one moisture-resistant layer (25) are transparent for the emitting or receiving radiation (RE;RR). The moisture protective structure (10) further includes a pressurizing member (55;57;59) attached to the supporting means (20). The pressurizing member (55;57;59) includes an elastic deformable material (40;42) and it is arranged to exert a pressure on the moisture-resistant cover (30) towards the second side (S2) of the device (15). The pressure on the moisture-resistant cover (30) ensures that the first side (S1) of the device (15) is sealed against moisture penetration.