专利检索 ap:("HAMAMATSU PHOTONICS K.K." OR "Ohmi, Tadahiro") AND inv:"Inaba, Hitoshi" 第 1 页

1.

发明公开
Apparatus and method for producing gaseous ions by use of x-rays, and various apparatuses and structures using them 失效
标题翻译：装置和使用X射线和它们在各种装置和结构应用用于生产气态离子的方法

公开(公告)号：EP1448029A2

公开(公告)日：2004-08-18

申请号：EP04007880.0

申请日：1993-08-13

申请人： TAKASAGO NETSUGAKU KOGYO KABUSHIKI KAISHA , Hamamatsu Photonics K.K. , OHMI, Tadahiro

发明人： Ohmi, Tadahiro , Inaba, Hitoshi , Ikedo, Tomoyuki

IPC分类号： H05F3/06

CPC分类号： H05F3/06

摘要： A transfer apparatus having a transfer chamber for transferring an object to be processed to a processing apparatus, characterized in that an electromagnetic wave in a soft X-ray region can be irradiated to an athmospheric gas in the transfer chamber.

摘要翻译： 具有用于对象的传递环的传送室的传输装置将要处理的处理装置，其特征在于在软X射线区的电磁波能在athmospheric气体中的传输室被照射到没有。

2.

发明公开
Apparatus and method for producing gaseous ions by use of x-rays, and various apparatuses and structures using them 失效
标题翻译：装置和使用X射线和它们在各种装置和结构应用用于生产气态离子的方法

公开(公告)号：EP1448029A3

公开(公告)日：2010-01-27

申请号：EP04007880.0

申请日：1993-08-13

申请人： HAMAMATSU PHOTONICS K.K. , Ohmi, Tadahiro

发明人： Ohmi, Tadahiro , Inaba, Hitoshi , Ikedo, Tomoyuki

IPC分类号： H05F3/06 , H01L21/02 , H01L21/68 , A01G7/00 , E04H5/02

CPC分类号： H05F3/06

摘要： A transfer apparatus having a transfer chamber for transferring an object to be processed to a processing apparatus, characterized in that an electromagnetic wave in a soft X-ray region can be irradiated to an athmospheric gas in the transfer chamber.