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公开(公告)号：EP1693656A4
公开(公告)日：2010-12-08
申请号：EP04819369
申请日：2004-11-24
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KAGEYAMA MITSUAKI , SHIBAYAMA KATSUMI , MIZUNO SEIICHIRO , TEICHMANN HELMUT , HILLER DIETMAR , STARKER ULRICH
CPC classification number: H01L27/1446 , G01J3/0243 , G01J3/0256 , G01J3/0291 , G01J3/2803
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