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1.发明公开Interference film filters, optical waveguides and methods for producing them 失效Dünnschichtinterferenzfilter，optische Wellenleiter和Verfahren zu ihrer Herstellung。
公开(公告)号：EP0266214A2
公开(公告)日：1988-05-04
申请号：EP87309609.3
申请日：1987-10-30
申请人： HITACHI, LTD.
发明人： Miura, Yuuji , Baba, Noboru
CPC分类号： G02B6/132 , C23C14/06 , G02B5/285 , G02B2006/12109 , Y10S359/90
摘要： Interference film filters and optical waveguides with low loss of light, including a laminate deposition-formed on a substrate (1,30) by alternate sputtered lamination of a first film (2,4,10) of amorphous Si x C y O z (x:y:z = 1:0.6-1:0-0.5) having refractive index up to 3.4 and an extinction coefficient below 0.1 and a second thin film (3,5,20) of amorphous Si x O y C z (x:y:z = 1:1.8-2:0-0.5) having a low refractive index in comparison with that of the first thin film. The two film types may be sputtered from a single sintered SiC target by varying oxygen content of a sputter gas mixture.
摘要翻译： 具有低损失光的干涉膜滤光器和光波导，包括通过交替溅射层压沉积形成在基底（1,30）上的层压沉积的非晶SixCyOz（x：y：z）的第一膜（2,4,10） 折射率高达3.4，消光系数低于0.1，第二薄膜（3,5,20）为无定形六方碳（x：y：z = 1：1.8-2 ：0-0.5）与第一薄膜相比具有低折射率。 可以通过改变溅射气体混合物的氧含量从单个烧结的SiC靶溅射两种膜类型。
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2.发明公开
公开(公告)号：EP0266214A3
公开(公告)日：1990-01-31
申请号：EP87309609.3
申请日：1987-10-30
申请人： HITACHI, LTD.
发明人： Miura, Yuuji , Baba, Noboru
CPC分类号： G02B6/132 , C23C14/06 , G02B5/285 , G02B2006/12109 , Y10S359/90
摘要： Interference film filters and optical waveguides with low loss of light, including a laminate deposition-formed on a substrate (1,30) by alternate sputtered lamination of a first film (2,4,10) of amorphous Si x C y O z (x:y:z = 1:0.6-1:0-0.5) having refractive index up to 3.4 and an extinction coefficient below 0.1 and a second thin film (3,5,20) of amorphous Si x O y C z (x:y:z = 1:1.8-2:0-0.5) having a low refractive index in comparison with that of the first thin film. The two film types may be sputtered from a single sintered SiC target by varying oxygen content of a sputter gas mixture.
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