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    Glow discharge drilling apparatus and glow discharge drilling method
    2.
    发明公开
    Glow discharge drilling apparatus and glow discharge drilling method 审中-公开
    Bohrvorrichtung und -verfahrenfürGlimmentladung

    公开(公告)号：EP1715504A2

    公开(公告)日：2006-10-25

    申请号：EP06008021.5

    申请日：2006-04-18

    申请人： HORIBA, LTD. ,  Keio University

    发明人： Hirano, Akihiro ,  Matsumoto, Koichi ,  Uchida, Yoshinobu ,  Mitani, Tomoaki ,  Shimizu, Kenichi

    IPC分类号： H01J37/31 ,  H01J37/301

    CPC分类号： H01J37/32082 ,  G01N1/08 ,  G01N1/32 ,  H01J37/301 ,  H01J37/31 ,  H01J37/32018 ,  H01J37/32366 ,  H01J2237/31745 ,  H01J2237/334

    摘要： A glow discharge drilling apparatus (1) enables switching of a continuous mode for continuously supplying electric power and an intermittent mode for intermittently supplying electric power. Electric power is supplied in the intermittent mode with respect to a sample (S) easily melted by a heat due to a glow discharge and a sample (S) easily broken by a force of sputtering due to a glow discharge or the like, whereby the sample (S) is drilled so that an observation face capable of carrying out good observation can be obtained. When the sample (S) is not easily melted and easily broken, the sample (S) is drilled so that a good observation face can be efficiently obtained by supplying electric power in the continuous mode.

    摘要翻译： 辉光放电钻孔装置（1）能够切换用于连续供电的连续模式和用于间歇地供电的间歇模式。 相对于由辉光放电引起的热容易熔化的样品（S）和由于辉光放电等容易被溅射的力破坏的样品（S）而以间歇模式供电， 钻取样品（S），从而可以获得能够进行良好观察的观察面。 当样品（S）不容易熔化并容易断裂时，钻取样品（S），从而通过以连续模式供给电力可以有效地获得良好的观察面。