MEMS-BASED TUNABLE FILTER
    1.
    发明公开
    MEMS-BASED TUNABLE FILTER 审中-公开
    可调谐滤波器ON MEMS BASIS

    公开(公告)号:EP2497189A1

    公开(公告)日:2012-09-12

    申请号:EP10776036.5

    申请日:2010-10-30

    发明人: ROGERS, John, E.

    IPC分类号: H03H7/01 H01G5/16

    摘要: A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.