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    Combined sensor and its fabrication method
    1.
    发明公开
    Combined sensor and its fabrication method 审中-公开
    Kombinierter传感器和sein Herstellungsverfahren

    公开(公告)号：EP1762823A2

    公开(公告)日：2007-03-14

    申请号：EP06018553.5

    申请日：2006-09-05

    申请人： Hitachi, Ltd.

    发明人： Akashi, Teruhisa, c/o Hitachi, Ltd. ,  Okada, Ryoji, c/o Hitachi, Ltd. ,  Hayashi, Masahide, c/o Hitachi, Ltd. ,  Suzuki, Kengo, c/o Hitachi, Ltd.

    IPC分类号： G01C19/56 ,  G01P15/097

    CPC分类号： G01P15/0802 ,  G01C19/5719 ,  G01P15/097 ,  G01P15/14 ,  G01P15/18 ,  G01P2015/082

    摘要： A sensor structure using vibrating sensor elements (1a, 1b, 1c, 1d) which can detect an angular rate and accelerations in two axes at the same time is provided. 2 sets of vibration units (1a, 1b; 1c, 1d) which vibrate in out-of-phase mode (tunning-fork vibration) and include four vibrating sensor elements of the approximately same shape supported on a substrate in a vibratile state are provided and the vibrating sensor elements are disposed so that vibration axes of the vibration units cross each other at right angles. Each of the vibrating sensor elements includes a pair of detection units (3a, 3b, 3c, 3d) and adjustment units (4a, 4b, 4c, 4d) for adjusting a vibration frequency. The vibrating sensor elements constitute a combined sensor having supporting structure for supporting the vibrating sensor elements independently so that the vibrating sensor elements do not interfere with each other.

    摘要翻译： 提供了可以同时检测两个轴的角速度和加速度的振动传感器元件（1a，1b，1c，1d）的传感器结构。 提供振动异相模式（调音叉振动）的2组振动单元（1a，1b; 1c，1d），并且包括以振动状态支撑在基板上的大致相同形状的四个振动传感器元件 并且振动传感器元件被布置成使得振动单元的振动轴线成直角交叉。 每个振动传感器元件包括一对用于调节振动频率的检测单元（3a，3b，3c，3d）和调节单元（4a，4b，4c，4d）。 振动传感器元件构成具有用于独立地支撑振动传感器元件的支撑结构的组合传感器，使得振动传感器元件彼此不干涉。