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公开(公告)号：EP2466412A3
公开(公告)日：2013-04-17
申请号：EP11009738.3
申请日：2011-12-09
CPC分类号： G05D11/132 , G01N33/0006 , Y10T137/0318 , Y10T137/7759 , Y10T137/7761 , Y10T137/87249 , Y10T137/8729 , Y10T137/87314 , Y10T137/87676
摘要： The present invention is one that prevents standard gas from remaining in a standard gas line 3 to prevent a concentration of the standard gas from being reduced due to adsorption, modification, or the like of the standard gas, and has: a diluent gas line 2 that is provided with a diluent gas flow rate controlling mechanism 23; a standard gas line 3 that is provided with a standard gas flow rate controlling mechanism 33; an output gas line 4 that is joined by the diluent gas line 2 and standard gas line 3 and outputs the standard gas having a predetermined concentration; an exhaust gas line 5 that is connected to an upstream side of the standard gas flow rate controlling mechanism 33 in the standard gas line 3 and provided with an on/off valve and a flow rate control part; and a control part 6 that, depending on a flow rate of the standard gas flowing through the standard gas line 3 or the type of the standard gas, switches on/off of the on/off valve.
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公开(公告)号：EP2466412B1
公开(公告)日：2014-05-14
申请号：EP11009738.3
申请日：2011-12-09
CPC分类号： G05D11/132 , G01N33/0006 , Y10T137/0318 , Y10T137/7759 , Y10T137/7761 , Y10T137/87249 , Y10T137/8729 , Y10T137/87314 , Y10T137/87676
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公开(公告)号：EP2466412A2
公开(公告)日：2012-06-20
申请号：EP11009738.3
申请日：2011-12-09
IPC分类号： G05D11/13
CPC分类号： G05D11/132 , G01N33/0006 , Y10T137/0318 , Y10T137/7759 , Y10T137/7761 , Y10T137/87249 , Y10T137/8729 , Y10T137/87314 , Y10T137/87676
摘要： The present invention is one that prevents standard gas from remaining in a standard gas line 3 to prevent a concentration of the standard gas from being reduced due to adsorption, modification, or the like of the standard gas, and has: a diluent gas line 2 that is provided with a diluent gas flow rate controlling mechanism 23; a standard gas line 3 that is provided with a standard gas flow rate controlling mechanism 33; an output gas line 4 that is joined by the diluent gas line 2 and standard gas line 3 and outputs the standard gas having a predetermined concentration; an exhaust gas line 5 that is connected to an upstream side of the standard gas flow rate controlling mechanism 33 in the standard gas line 3 and provided with an on/off valve and a flow rate control part; and a control part 6 that, depending on a flow rate of the standard gas flowing through the standard gas line 3 or the type of the standard gas, switches on/off of the on/off valve.
摘要翻译： 本发明是防止标准气体残留在标准气体管线3中以防止由标准气体的吸附，改性等引起的标准气体浓度降低的现象，并具有：稀释气体管线2 设置有稀释气体流量控制机构23; 设有标准气体流量控制机构33的标准气体管路3; 输出气体管线4，其通过稀释气体管线2和标准气体管线3连接并输出具有预定浓度的标准气体; 与标准气体流路控制机构33的标准气体流量控制机构33的上游侧连接并设置有开关阀和流量控制部的排气管路5; 以及控制部6，其根据流过标准气体管路3的标准气体的流量或标准气体的种类，开闭开闭阀。
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