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公开(公告)号:EP4411139A1
公开(公告)日:2024-08-07
申请号:EP22897034.9
申请日:2022-04-22
发明人: LI, Shiguang , WU, Nan , WANG, Xiaodong , XIONG, Linqiang , ZHENG, Jianfeng , CHENG, Yupeng , ZHANG, Yunjie , HE, Fu
IPC分类号: F04B43/04
摘要: A micro fluid control apparatus (100) and an electronic device (1) are provided. The micro fluid control apparatus (100) includes an oscillator layer (20) and a resonance layer (10) that are stacked. A vibration portion (21) of the oscillator layer (20) is connected to a fastening portion (22) by using a connection portion (23). The vibration portion (21) can vibrate. The micro fluid control apparatus (100) further includes a bonding layer (30) and a support structure (12). The bonding layer (30) is located between the fastening portion (22) and the resonance layer (10), so that the resonance layer (10) is connected to the oscillator layer (20) by using the bonding layer (30). The support structure (12) is also located between the fastening portion (22) and the resonance layer (10), so that a spacing is reserved between the resonance layer (10) and the oscillator layer (20). In this way, the support structure (12), the oscillator layer (20), and the resonance layer (10) form, in an enclosing manner, a chamber for accommodating fluid and allowing the fluid to pass through, to control a flow of the fluid. The spacing is formed between the oscillator layer and the resonance layer by using a support height of the support structure, and a height and a position of the support structure are easy to control, so that a height of the spacing is accurately controlled. This reduces or avoids an excessively large or excessively small height of the spacing, ensures consistency of the height of the spacing, and improves performance of the micro fluid control apparatus.