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公开(公告)号：EP1711966A4
公开(公告)日：2011-02-16
申请号：EP04704467
申请日：2004-01-22
Applicant: IBM
Inventor： BEINTNER JOCHEN , CHIDAMBARRAO DURESETI , DIVKARUNI RAMACHANDRA
IPC: H01L29/786 , H01L21/336 , H01L21/8238
CPC classification number: H01L29/78642 , H01L21/2257 , H01L29/66787
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