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公开(公告)号：EP1399958A4
公开(公告)日：2010-08-25
申请号：EP02744765
申请日：2002-06-27
Applicant: IBM , INFINEON TECHNOLOGIES CORP
Inventor： BARTH HANS-JOACHIM , BURRELL LLYOD G , FRIESE GERALD R , STETTER MICHAEL
IPC: H01L21/3205 , H01L23/525 , H01L21/768 , H01L21/82 , H01L23/52 , H01L23/522 , H01L27/10
CPC classification number: H01L23/5258 , H01L2924/0002 , H01L2924/00
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