公开(公告)号：EP1434021A1

公开(公告)日：2004-06-30

申请号：EP02775251.8

申请日：2002-09-27

申请人： IHI Aerospace Co., Ltd.

发明人： KAWASAKI, Kazunori, IHI AEROSPACE CO., LTD. ,  ASAHI, Hiroaki, IHI AEROSPACE ENGINEERING CO., LTD ,  MURAMATSU, Shoji, IHI AEROSPACE CO., LTD. ,  TAKADA, Tetsuya, IHI AEROSPACE ENGINEERING CO.LTD

IPC分类号： F27B17/00

CPC分类号： F27D21/02 ,  F27B17/00 ,  F27B17/0016 ,  F27B17/02 ,  F27D7/06 ,  F27D11/00 ,  F27D19/00 ,  H05B6/32

摘要： An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.

摘要翻译： 通过在真空室中将待样品悬浮的位置上相互垂直截取的三个轴上分别设置三对相对的电极来提高静电悬浮炉，并且设置多个导向孔 到样品的位置，树立到真空室，由此对样品的可触及方向多样化，可以提高各种装置的分配自由度，并且容易应对装置的增加。