摘要:
A method for generating highly concentrated ozone gas adsorbs ozone gas generated by an ozonizer with an adsorbent within an adsorption column and then separates highly concentrated ozone gas from the adsorption column. Three adsorption columns (2) are arranged in parallel with each other. Each of the adsorption columns (2) is controlled so as to repeat four steps of an ozone gas adsorbing step, a stabilizing and pressurizing step, an ozone gas desorbing step and a cooling down step. Each of the ozone gas adsorbing step and the ozone gas desorbing step has operation time set twice the operation time of each of the stabilizing and pressurizing step and the cooling down step. An ozone gas concentrating unit comprises three adsorption columns (2) which are set to operate one after another by 1/3 cycle lag. Highly concentrated ozone gas separated at the desorbing step of each adsorption column 2 is once stored in an ozone gas storage vessel (30), from which the highly concentrated ozone gas is supplied to an ozone gas using installation after a flow controller has regulated its flow amount to a constant one.