公开(公告)号：EP2154520B1

公开(公告)日：2015-12-09

申请号：EP08752457.5

申请日：2008-05-08

申请人： Ideal Star Inc.

发明人： KASAMA, Yasuhiko ,  OMOTE, Kenji ,  YOKOO, Kuniyoshi ,  MIZOBUCHI, Yuzo ,  OIZUMI, Haruna ,  SAIDA, Morihiko ,  SAGAMI, Hiroyuki ,  MIZOKAMI, Kazuaki ,  FURUKAWA, Takeo

IPC分类号： G01N27/22

CPC分类号： G01N27/226 ,  G01N27/12

公开(公告)号：EP2154520A1

公开(公告)日：2010-02-17

申请号：EP08752457.5

申请日：2008-05-08

申请人： Ideal Star Inc. ,  Tokyo University Of Science Educational Foundation Administrative Organization

发明人： KASAMA, Yasuhiko ,  OMOTE, Kenji ,  YOKOO, Kuniyoshi ,  MIZOBUCHI, Yuzo ,  OIZUMI, Haruna ,  SAIDA, Morihiko ,  SAGAMI, Hiroyuki ,  MIZOKAMI, Kazuaki ,  FURUKAWA, Takeo

IPC分类号： G01N27/22

CPC分类号： G01N27/226 ,  G01N27/12

摘要： Provided are a gas sensor, which is extremely compact to be arranged for separated gas piping in semiconductor device manufacturing equipment, a gas measuring system using such gas sensor, and a gas detection module for the gas measuring system. The gas sensor is provided with a gas detection device containing a dielectric semiconductor, the electric conductivity of the gas detection device varying in response to the degree of adsorption of gases to the gas detection device, a capacitive element connected in series to the gas detection device, and a pair of electrodes which are connected to electric terminals of an electric element comprising the gas detection device and the capacitive element, wherein the gas sensor is capable of detecting the degree of adsorption of gases to the gas detection device from an electrical response changing in response to a voltage which is applied to the pair of electrodes and which periodically varies and reverses in polarity.

摘要翻译： 提供了一种气体传感器，其非常紧凑，可用于半导体器件制造设备中的分离气体管道，使用这种气体传感器的气体测量系统和用于气体测量系统的气体检测模块。 气体传感器设置有包含电介质半导体的气体检测装置，气体检测装置的导电性响应于气体到气体检测装置的吸附程度而变化，与气体检测装置串联连接的电容元件 以及连接到包括气体检测装置和电容元件的电气元件的电端子的一对电极，其中气体传感器能够从电响应变化检测气体到气体检测装置的吸附程度 响应于施加到该对电极并且周期性地变化并且极性反转的电压。