公开(公告)号：EP4418330A1

公开(公告)日：2024-08-21

申请号：EP22881043.8

申请日：2022-10-12

申请人： Idemitsu Kosan Co.,Ltd.

发明人： KAWASHIMA, Emi ,  TSURUMA, Yuki ,  SASAKI, Daichi ,  YAMAGUCHI, Koji ,  IWASE, Nobuhiro

IPC分类号： H01L29/786 ,  G02F1/1368 ,  H01L21/28 ,  H01L21/336 ,  H01L21/363 ,  H01L21/66 ,  H01L29/417

CPC分类号： G02F1/1368 ,  H01L21/02107 ,  H01L21/28 ,  H01L22/00 ,  H01L29/417 ,  H01L29/66477 ,  H01L29/786

摘要： A crystalline oxide thin film including In as a main component, wherein the crystalline oxide thin film includes a low-resistance region A and a high-resistance region B that have different spread resistance values measured with a scanning spread resistance microscope (SSRM) in a plane direction thereof, and the spread resistance value of the high-resistance region B is 8 times or more as large as the spread resistance value of the low-resistance region A.