公开(公告)号：EP1349219A2

公开(公告)日：2003-10-01

申请号：EP03251892.0

申请日：2003-03-26

申请人： International Superconductivity technology Center, The Juridical Foundation

发明人： Adachi, Seiji, c/o SuperConductivity Research Lab. ,  Wakana, Hironori, c/o SuperConductivity Res. Lab. ,  Ishimaru, Yoshihiro, c/o SuperConductivity Res Lab ,  Horibe, Masahiro, c/o SuperConductivity Res. Lab. ,  Horibe, Osami, c/o SuperConductivity Research Lab. ,  Tarutani, Yoshinobu, c/o SuperConductivity Res Lab ,  Tanabe, Keiichi, c/o SuperConductivity Res. Lab.

IPC分类号： H01L39/24 ,  H01L27/18

CPC分类号： H01L39/2496 ,  Y10T29/49014

摘要： A method of fabricating a Josephson device includes the steps of forming a first superconducting layer (12) and forming a second superconducting layer (15) to form a Josephson junction therebetween, wherein the step of forming the second superconducting layer (15) includes the steps of conducting a first step of forming the second superconducting layer (15) with improved uniformity and conducting a second step of forming the second superconducting layer (15) on the second superconducting layer (15) formed in the first step with improved film quality.

摘要翻译： 制造约瑟夫逊器件的方法包括以下步骤：形成第一超导层（12）并形成第二超导层（15）以在其间形成约瑟夫逊结，其中形成第二超导层（15）的步骤包括步骤 以改进的均匀性进行形成第二超导层（15）的第一步骤，并且进行在第一步骤中形成的第二超导层（15）上形成第二超导层（15）的第二步骤，并提高膜质量。