-
1.发明公开
公开(公告)号：EP4285100A1
公开(公告)日：2023-12-06
申请号：EP21923502.5
申请日：2021-12-27
Applicant: J.A. Woollam Co., Inc.
-
2.发明授权COMBINED USE OF OSCILLATING MEANS AND ELLIPSOMETRY TO DETERMINE UNCORRELATED EFFECTIVE THICKNESS AND OPTICAL CONSTANTS OF MATERIAL DEPOSITED FROM A FLUID 有权与振荡联用椭偏装置用于确定流体的有效不相关THICK以及光学常数由沉积的材料
公开(公告)号：EP2008067B1
公开(公告)日：2015-10-14
申请号：EP06788947.7
申请日：2006-07-30
Applicant: J.A. WOOLLAM CO. INC.
Inventor： WOOLAM, John A. , WELCH, James D.
CPC classification number: G01N21/211 , G01B11/0641
-
3.发明公开COMBINED USE OF OSCILLATING MEANS AND ELLIPSOMETRY TO DETERMINE UNCORRELATED EFFECTIVE THICKNESS AND OPTICAL CONSTANTS OF MATERIAL DEPOSITED FROM A FLUID 有权与振荡联用椭偏装置用于确定流体的有效不相关THICK以及光学常数由沉积的材料
公开(公告)号：EP2008067A1
公开(公告)日：2008-12-31
申请号：EP06788947.7
申请日：2006-07-30
Applicant: J.A. WOOLLAM CO. INC.
Inventor： WOOLAM, John A. , WELCH, James D.
IPC: G01J4/00
CPC classification number: G01N21/211 , G01B11/0641
Abstract: A combined ellipsometer and oscillator system applied to a chamber (CH) for containing fluid, and method of decorrelated determination of thickness and optical constants of depositable materials present in a fluid. In use the ellipsometer determines the product of thickness and optical constant, and the oscillator system changes frequency of oscillation proportional to the thickness of material deposited upon a surface of an element therein.
-
-
Search Results
3
records
(took 0.008 seconds)
