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公开(公告)号：EP0463815B1
公开(公告)日：1995-09-27
申请号：EP91305621.4
申请日：1991-06-21
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公开(公告)号：EP0463815A1
公开(公告)日：1992-01-02
申请号：EP91305621.4
申请日：1991-06-21
发明人： Suzuki, Setsuo, c/o Intellectual Property Div. , Noda, Etsuo, c/o Intellectual Property Div. , Morimiya, Osami, c/o Intellectual Property Div.
摘要： A vacuum ultraviolet light source for generating a pulse discharge in a low pressure gas and extracting ultraviolet light from a plasma created in that discharge, is disclosed which comprises a discharge space P, a plate-like anode (It) located in the discharge space, a plurality of hollow cathodes (21) located in the discharge space in an opposed, spaced-apart relation to the anode, auxiliary electrodes (24) provided in an inside space of the hollow cathode in a state shielded from the hollow cathode, means which, while maintaining a pressure in the discharge space constant, flows a gas along a route in the discharge space after passing through an inner space in each hollow cathode, a power supply (31) for supplying an electric power for generating a main discharge across the hollow cathode and the anode after a pre-discharge is produced across each hollow cathode and the anode, and ultraviolet extracting means (15, 16) for extracting ultraviolet light radiated from a plasma which is produced by a discharge in the discharge space.
摘要翻译： 一种用于在低压气体中产生脉冲放电并从该放电产生的等离子体中提取紫外光的真空紫外光源，其包括放电空间P，位于放电空间中的板状阳极（It） 多个中空阴极（21）以与阳极相对间隔开的关系位于放电空间中，辅助电极（24）以与空心阴极屏蔽的状态设置在中空阴极的内部空间中， 在保持放电空间中的压力恒定的同时，在通过每个中空阴极的内部空间之后沿着放电空间中的路径流动气体，用于提供用于产生主放电的电力的电源（31） 在每个中空阴极和阳极之间产生预放电后的空心阴极和阳极，以及用于提取从等离子体辐射的紫外线的紫外线提取装置（15,16） 由放电空间中的放电产生。
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