公开(公告)号：EP1492160A1

公开(公告)日：2004-12-29

申请号：EP03708661.8

申请日：2003-03-18

申请人： KABUSHIKI KAISHA WATANABE SHOKO

发明人： YAMOTO, Hisayoshi; c/o WACOM ELECTRIC CO., LTD ,  KUSUHARA, Mitsuru; c/o WACOM ELECTRIC CO., LTD ,  TODA, Masayuki

IPC分类号： H01L21/205

CPC分类号： C23C16/4481

摘要： There is provided a vaporizer that can be used for a long period of time without being clogged and can supply a raw material stably to a reaction section. The evaporator includes a dispersion section 8 having a gas passage 2 formed in a dispersion section body 1, a gas introduction port 4 for introducing a pressurized carrier gas 3 into the gas passage 2, means 6 for supplying a raw material solution 5 to the gas carrier passing through the gas passage 2, a gas outlet 7 for sending the carrier gas containing the dispersed raw material solution 5 to a vaporization section 22, and means 18 for cooling the gas passage 2; and the vaporization section 22 for heating and vaporizing the carrier gas in which the raw material solution is dispersed, having a vaporization tube 20 connected to the reaction section of an apparatus and the gas outlet 7 of the dispersion section 8, and a heater 21 for heating the vaporization tube 20, and is characterized in that the pressure of the reaction section is set lower than the pressure of the vaporization tube.

摘要翻译： 分散单元（8）的气体出口（7）将分散在气体通路（2）中的含有原料溶液（5）的载气送入蒸发单元（22）。 连接到气体出口的蒸发单元的蒸发管（20），当加热器（21）加热时，用溶液加热和蒸发载气。 还包括以下独立权利要求：（1）化学气相沉积装置; 和（2）汽化方法。