专利检索 ap:("KANSAI TECH LICENSING ORG CO") AND inv:"MATSUI RYOUJI" 第 1 页

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发明公开
EXTREME ULTRAVIOLET LIGHT SOURCE AND TARGET FOR EXTREME ULTRAVIOLET LIGHT SOURCE TARGET 有权
标题翻译： EXTREME UV光源和目标EXTREME UV光源

公开(公告)号：EP1612848A4

公开(公告)日：2009-11-11

申请号：EP03786368

申请日：2003-12-26

申请人： KANSAI TECH LICENSING ORG CO

发明人： NAGAI KEIJI , NISHIMURA HIROAKI , NORIMATSU TAKAYOSHI , NISHIHARA KATSUNOBU , MIYANAGA NORIAKI , NAKATSUKA MASAHIRO , IZAWA YASUKAZU , YAMANAKA TATSUHIKO , NAKAI MITSUO , SHIGEMORI KEISUKE , MURAKAMI MASAKATSU , SHIMADA YOSHINORI , UCHIDA SHIGEAKI , FURUKAWA HIROYUKI , SUNAHARA ATSUSHI , ZHAKHOVSKI VASILLI , MATSUI RYOUJI , HIBINO TAKAHIRO , OKUNO TOMOHARU

IPC分类号： H01L21/027 , G03F7/20 , G21K1/00 , G21K5/02 , H01J35/08 , H05G1/00 , H05G2/00 , H05H1/24

CPC分类号： H05G2/001 , B82Y10/00 , G03F7/70033