PROCESS FOR PURIFICATION OF MONOSILANE
    1.
    发明公开
    PROCESS FOR PURIFICATION OF MONOSILANE 审中-公开
    PROCEDURE净化甲硅烷

    公开(公告)号:EP2501651A2

    公开(公告)日:2012-09-26

    申请号:EP10790866.7

    申请日:2010-11-08

    申请人: KCC Corporation

    IPC分类号: C01B33/04 C01B33/039

    CPC分类号: C01B33/046

    摘要: Provided is a method of purifying monosilane. More particularly, the method includes removing impurities from a crude material containing monosilane and ethylene by fractional distillation (operation 1), and removing ethylene and residual impurities by passing the crude material purified in operation 1 through activated carbon (operation 2). According to the method, high-purity monosilane may be more simply and effectively obtained without additional production of byproducts by selectively adsorbing ethylene, which is difficult to separate by fractional distillation, using an activated carbon.