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1.发明公开
公开(公告)号：EP2766693A4
公开(公告)日：2015-08-19
申请号：EP12839434
申请日：2012-10-11
Applicant: KLA TENCOR CORP
Inventor： SHCHEGROV ANDREI V , ROTTER LAWRENCE D , WANG DAVID Y , VELDMAN ANDREI , PETERLINZ KEVIN , BRADY GREGORY , SHAUGHNESSY DERRICK
CPC classification number: G01N21/211 , G01B11/0616 , G01N21/4738 , G01N21/55 , G01N2021/213 , G03F7/70608 , G03F7/70625 , G03F7/70633
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