Patent search ap:("KLA TENCOR TECH CORP") AND inv:"STOKOWSKI STANLEY E" Page 1

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发明公开
METHOD FOR MONITORING A RETICLE 有权
Title translation: 监测方法光罩

公开(公告)号：EP1875309A4

公开(公告)日：2012-03-07

申请号：EP06749311

申请日：2006-04-03

Applicant: KLA TENCOR TECH CORP

Inventor： WATSON STERLING G , LEVY ADY , MACK CHRIS A , STOKOWSKI STANLEY E , SAIDIN ZAIN K

IPC: G06K9/00 , G01R31/26 , H01L21/22 , H01L21/38 , H01L21/66

CPC classification number: G03F1/84 , G03F1/38 , G03F1/50 , G03F7/70433 , G03F7/70625 , Y10S430/146

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