公开(公告)号：EP1093685A4

公开(公告)日：2004-09-01

申请号：EP99955370

申请日：1999-05-27

申请人： KNOWLES ELECTRONICS LLC

发明人： PEDERSEN MICHAEL ,  LOEPPERT PETER

IPC分类号： H02N1/00 ,  H04R19/00 ,  H04R19/04 ,  H04R3/06 ,  H04R9/08

CPC分类号： H04R19/005 ,  H02N1/006 ,  H04R19/04

摘要： A solid state transducer (9) is disclosed. The transducer comprises a micromachined electrostatic actuator (16) formed of silicon, a support brace (10) disposed about the actuator, and a membrane (14) coupled to the support brace. The actuator is operatively coupled to the membrane. The transducer may be either a receiver or a microphone.