公开(公告)号：EP1358670A4

公开(公告)日：2004-11-17

申请号：EP02736487

申请日：2002-02-08

申请人： KOBE STEEL LTD

发明人： MASUDA KAORU ,  ILJIMA KATSUYUKI ,  SUZUKI TETSUO ,  KAWAKAMI NOBUYUKI ,  YAMAGATA MASAHIRO ,  PETERS DARYL W ,  EGBE MATTHEW I

IPC分类号： B08B3/08 ,  B08B3/10 ,  B08B7/00 ,  C11D7/00 ,  C11D7/08 ,  C11D7/26 ,  C11D7/32 ,  C11D7/60 ,  C11D11/00 ,  C11D17/00 ,  F26B5/04 ,  G03F7/42 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306 ,  H01L21/311 ,  B08B3/00 ,  C11D1/00 ,  C11D3/37

CPC分类号： C11D7/02 ,  B08B7/0021 ,  C11D7/04 ,  C11D7/10 ,  C11D7/3209 ,  C11D7/3218 ,  C11D7/5004 ,  C11D11/0047 ,  G03F7/422 ,  G03F7/425 ,  H01L21/02052 ,  H01L21/31116 ,  H01L21/31133 ,  H01L21/67086

摘要： A process for removing residues from the microstructure of an object is provided, which comprises steps of preparing a remover including CO2 and additive for removing the residues and a co-solvent dissolving the additive in said CO2 at a pressurized fluid condition; and bringing the object into contact with the remover so as to remove the residues from the object. An apparatus for implementing the process is also provided.