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    Charged particle optical systems having therein means for correcting aberrations
    2.
    发明公开
    Charged particle optical systems having therein means for correcting aberrations 失效
    Optisches Systemfürgeladene Teilchen mit Vorrichtung zur Korrektur der Aberration。

    公开(公告)号：EP0255981A1

    公开(公告)日：1988-02-17

    申请号：EP87305696.4

    申请日：1987-06-25

    申请人： KRATOS ANALYTICAL LIMITED ,  VSW SCIENTIFIC INSTRUMENTS LTD.

    发明人： King George Christopher ,  Read, Frank Henry

    IPC分类号： H01J3/12 ,  H01J1/46 ,  H01J49/22

    CPC分类号： H01J49/22 ,  H01J3/12 ,  H01J49/06 ,  H01J49/20 ,  H01J49/48

    摘要： A charged particle optical system, e.g. an energy or mass analyser or a lens system, has a plurality of corrector electrodes (20 to 23) spaced apart across a particle beam passing from a monoenergetic source (4) to a focus (6) and dividing the beam into individual portions with central trajectories (30,31,32) the connector electrodes being electrically biassed to deflect the particles of the beam so as to reduce the aberration caused by portions with central trajectories intersecting the optical axis at different distances from the desired focus.

    摘要翻译： 带电粒子光学系统，例如 能量或质量分析器或透镜系统具有跨越从单能源（4）到聚焦（6）的粒子束间隔开的多个校正电极（20至23），并将光束分成具有中心的单独部分 轨迹（30,31,32），连接器电极被电偏压以偏转光束的粒子，以便减少由具有与期望焦点不同距离处的光轴相交的中心轨迹的部分引起的像差。