-
公开(公告)号：EP3896529A1
公开(公告)日：2021-10-20
申请号：EP20169233.2
申请日：2020-04-13
发明人： Grigaliunas, Viktoras , Tamulevicius, Sigitas , Andrulevicius, Mindaugas , Tamulevicius, Tomas , Fataraite-Urboniene, Egle , Narmontas, Pranas , Klinavicius, Tomas , Jucius, Dalius , Juodenas, Mindaugas
摘要： The present invention discloses a method that combines two different hologram origination processes in a single photoresist layer by using an interlayer to transfer structures exposed by electron beam lithography into overlapped with dot-matrix hologram areas, and fabricated holographic structures are replicated in multilayer polymer films. Dot-matrix technique is low cost process, which has high origination speed and can be used for the patterning of large areas of holograms with high diffraction efficiency. Electron beam lithography allows the formation of high resolution structures. The proposed manufacturing method allows combining these two technologies so that the final security device could contain electron beam patterned high resolution diffraction gratings, computer generated holograms, as well as dot-matrix laser patterned large hologram areas with high diffraction efficiency, providing an increased level of protection.
-
2.发明公开
公开(公告)号：EP4459237A1
公开(公告)日：2024-11-06
申请号：EP23171887.5
申请日：2023-05-05
发明人： Meskinis, Sarunas , Jucius, Dalius , Vasiliauskas, Andrius , Gudaitis, Rimantas , Grigaliunas, Viktoras , Lazauskas, Algirdas , Guobiene, Asta , Abakeviciene, Brigita , Juodenas, Mindaugas , Kasparaitis, Albinas
IPC分类号： G01D5/347
摘要： The present invention solves the fogging problem of photoelectric linear and rotary encoders used near or below the dew point temperature by coating the complex surface of their optical scales and scanning reticles with hydrophilic diamond-like carbon (DLC) films. These DLC films also increase the scratch and wear resistance of the scales and reticles, thus extending the service life of the encoders. The non-fogging optical scale or scanning reticle contains an optically smooth glass substrate, a lithographically defined micrometer-scale reflective metal pattern on the one glass surface, and a transparent hydrophilic DLC film with a thickness of 30-350 nm grown at least on the one surface. The invention provides a non-fogging optical scale/reticle device and a method capable of easily manufacturing the device.
-
公开(公告)号：EP4382870A1
公开(公告)日：2024-06-12
申请号：EP22212120.4
申请日：2022-12-08
发明人： Grigaliunas, Viktoras , Meskinis, Sarunas , Jucius, Dalius , Lazauskas, Algirdas , Guobiene, Asta , Abakeviciene, Brigita , Juodenas, Mindaugas , Gudaitis, Rimantas , Vasiliauskas, Andrius , Kasparaitis, Albinas
CPC分类号： G01D5/34707 , B32B33/00 , G02B27/0006 , G02B1/18 , G02B1/002
摘要： The present invention discloses a manufacturing method for anti-fogging incremental optical scales for rotary and linear displacement encoders. The fogging problem is very relevant for optical encoders as if the scale surface becomes fogged, the encoder stops working. The invention provides the scale device with the anti-fogging feature, and its fabrication method, which employs surface texturing and high surface energy diamond-like-carbon (DLC) coatings. The surface texture maintaining the optical transmittance of floated glass and inducing superhydrophilicity can be made using a parallel plate or ICP reactive ion etching process in the CF4/ O2 plasma. The non-fogging, transparent, hydrophilic, and wear-resistant DLC coating (5) can be grown by different deposition techniques, and the hydrophilicity of the coating (5) can be further increased by exposing the DLC coating surface to plasma, ion beam, or UV radiation. Such anti-fogging incremental scales enable the encoder to operate in a dew point environment.
-
-
搜索结果
3 条记录 (耗时 0.01 秒)
