专利检索 ap:("Kla-Tencor Corporation") AND inv:"YADAV, Rahul" 第 1 页

1.

发明公开
SYSTEM AND METHOD FOR INHIBITING VUV RADIATIVE EMISSION OF A LASER-SUSTAINED PLASMA SOURCE 审中-公开

公开(公告)号：EP3466220A1

公开(公告)日：2019-04-10

申请号：EP17803325.4

申请日：2017-05-19

申请人： Kla-Tencor Corporation

发明人： BEZEL, Ilya , GROSS, Kenneth P. , WILSON, Lauren , YADAV, Rahul , WITTENBERG, Joshua , BHUIYAN, Aizaz , SHCHEMELININ, Anatoly , CHIMMALGI, Anant , SOLARZ, Richard

IPC分类号： H05G2/00 , H01J65/04