公开(公告)号：EP3745084A1

公开(公告)日：2020-12-02

申请号：EP18902666.9

申请日：2018-08-14

申请人： Korea Research Institute of Standards and Science

发明人： GHIM, Young-sik ,  NGUYEN, The-mahn ,  RHEE, Hyug-gyo

IPC分类号： G01B11/25 ,  G01B9/02 ,  G06F17/10

摘要： The present disclosure is directed to a system and a method for compensating non-linear response characteristics in measuring the shape of an object using phase-shifting deflectometry. More particularly, the present disclosure is directed to a method for compensating non-linear response characteristics in phase-shifting deflectometry including steps of: generating a pattern by a pattern generating portion and projecting the same to a measurement object; obtaining an image of a deformed pattern reflected from the measurement object by a detector; linearizing non-linear responses on the basis of a look up table considering non-linear response characteristics of the pattern generating portion and the detector by a compensation means; and compensating phase-shifting amounts generated due to non-linear response characteristics by the compensation means.