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1.发明授权APPARATUS FOR MANUFACTURING AN INORGANIC THIN-FILM SOLAR CELL, AND METHOD FOR CONTROLLING SAME 有权用于制造无机薄膜太阳能电池的设备以及用于控制该无机薄膜太阳能电池的方法
公开(公告)号：EP2674990B1
公开(公告)日：2017-12-06
申请号：EP12744903.1
申请日：2012-02-09
发明人： PARK, Jung Jae , KIM, Do Yeon , LEE, Jong Gun , LEE, Min Wook , YOON, Suk Goo
IPC分类号： H01L31/18 , H01L31/042 , H01L21/02 , C23C24/04
CPC分类号： H01L31/18 , C23C24/04 , C23C24/045 , H01L21/02568 , H01L21/0259 , H01L21/02628 , H01L31/0322 , H01L31/0749 , H01L31/206 , Y02E10/541 , Y02P70/521
摘要： The present invention relates to an apparatus for manufacturing an inorganic thin-film solar cell, the apparatus including: a substrate stage which is mounted in a chamber and in which a solar cell substrate is disposed; and an inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle.
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2.发明公开APPARATUS FOR MANUFACTURING AN INORGANIC THIN-FILM SOLAR CELL, AND METHOD FOR CONTROLLING SAME 有权器具，用于产生无机薄膜太阳能电池及其控制方法
公开(公告)号：EP2674990A2
公开(公告)日：2013-12-18
申请号：EP12744903.1
申请日：2012-02-09
发明人： PARK, Jung Jae , KIM, Do Yeon , LEE, Jong Gun , LEE, Min Wook , YOON, Suk Goo
IPC分类号： H01L31/18 , H01L31/042
CPC分类号： H01L31/18 , C23C24/04 , C23C24/045 , H01L21/02568 , H01L21/0259 , H01L21/02628 , H01L31/0322 , H01L31/0749 , H01L31/206 , Y02E10/541 , Y02P70/521
摘要： The present invention relates to an apparatus for manufacturing an inorganic thin-film solar cell, the apparatus including: a substrate stage which is mounted in a chamber and in which a solar cell substrate is disposed; and an inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle.
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