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公开(公告)号:EP4012219A1
公开(公告)日:2022-06-15
申请号:EP21211234.6
申请日:2021-11-30
摘要: A purpose is to enhance vibration isolation performance of an active vibration isolation system with a simple configuration.
An active vibration isolation system 1 includes a plurality of active vibration isolation devices 20 each including: coil springs 24 elastically supporting a supported body 3 to a base 2; a vibration sensor 26, 27 configured to detect vibration states of the supported body and the base; an actuator 25 configured to apply a controlling force to the supported body: and a controller 28 configured to control the actuator so as to apply a controlling force to the supported body based on the vibration states detected by the sensor, the controlling force being used for attenuating vibrations of the supported body and vibrations transferred from the base to the supported body. The active vibration isolation devices are disposed at different locations on the base to support the supported body. The controller of each active vibration isolation device applies a controlling force to a portion of the supported body corresponding to a location on which the active vibration isolation device is placed, independently of and separately from the controller of the other active vibration isolation devices, based on vibration states of portions of the supported body and the base corresponding to the location detected by the sensor.