公开(公告)号：EP4215883A1

公开(公告)日：2023-07-26

申请号：EP21869131.9

申请日：2021-08-25

申请人： Kyoto Electronics Manufacturing Co., Ltd.

发明人： NAKAI, Shuji ,  MATSUKI, Takashi ,  WATANABE, Nobuaki

IPC分类号： G01F17/00 ,  G01F22/02 ,  G01N7/04 ,  G01N33/00 ,  G01N33/02

摘要： Provided is a residual gas volume measuring device capable of highly accurately measuring the volume of residual gas while preventing a deterioration in a pump that pressurizes an airtight container. This residual gas volume measuring device comprises: a second pipe 50 through which an airtight container 10 filled with a basic carbon dioxide absorbing liquid and a second reservoir 40 retaining pressurization water are in communication with each other, a section closer to the airtight container 10 of which is filled with the carbon dioxide absorbing liquid, and a section closer to the second reservoir 40 of which is filled with the pressurization water; and a pump P1 that is provided in the section of the second pipe 50 that is filled with the pressurization water. Before residual gas is introduced from a container B to be tested into the airtight container 10, the pump P1 sends the pressurization water in the second pipe 50 toward the second reservoir 40, and after the residual gas is introduced from the container B to be tested into the airtight container 10, the pump P1 sends the pressurization water in the second pipe 50 toward the airtight container 10.