公开(公告)号：EP3566245A1

公开(公告)日：2019-11-13

申请号：EP17932862.0

申请日：2017-11-21

申请人： Lam Research Corporation

发明人： RATHNASINGHE, Hiran Rajitha ,  TOKAIRIN, Shawn E S ,  MCCHESNEY, Jon

IPC分类号： H01L21/687 ,  H01L21/683 ,  H01L21/67

公开(公告)号：EP4102551A1

公开(公告)日：2022-12-14

申请号：EP22188723.5

申请日：2017-11-21

申请人： LAM Research Corporation

发明人： RATHNASINGHE, Hiran Rajitha ,  TOKAIRIN, Shawn E S ,  MCCHESNEY, Jon

IPC分类号： H01L21/687 ,  H01L21/683 ,  H01L21/67

摘要： A bottom ring is configured to support a moveable edge ring. The edge ring is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring. Each of the guide channels includes a first region having a smaller diameter than the guide channel, and the guide channels are configured to receive respective lift pins for raising and lowering the edge ring. Each of the guide channels has a cavity on the lower surface of the bottom ring, wherein the cavities have a diameter greater than the guide channel.