摘要:
A phase grating has a concave part of rectangular shape type substantially, of which grating depth is deeper in a specific range than depth d' calculated in a formula |n - n 0 | x (p - d'/e)/p x d' = (λ/2) x (1 + 2m) (where m = 0,±1,±2, ...) in terms of center wavelength λ of light having partial interference to be diffracted by the phase grating, pitch length p of the phase grating, refractive index n of base material of the phase grating, refractive index n 0 of medium surrounding the phase grating, and shape ratio e as the ratio of grating depth to width of slope of the concave part.
摘要:
A position detecting element that enables a position to be detected at high speed and high precision, and a range sensor using the same. The position detecting element is provided with a PIN photodiode array (1) having n segments and a parallel arithmetic processing portion (2) that calculates the segment having maximum intensity by comparing n outputs from the segments of the PIN photodiode array (1). The range sensor includes a light source by which the object to be measured is irradiated by optical beam, a lens that gathers rays of the reflected light from the surface of the object to be measured and the position detecting element mentioned above that detects the position of the light gathered by the lens.
摘要:
A position detecting element that enables a position to be detected at high speed and high precision, and a range sensor using the same. The position detecting element is provided with a PIN photodiode array (1) having n segments and a parallel arithmetic processing portion (2) that calculates the segment having maximum intensity by comparing n outputs from the segments of the PIN photodiode array (1). The range sensor includes a light source by which the object to be measured is irradiated by optical beam, a lens that gathers rays of the reflected light from the surface of the object to be measured and the position detecting element mentioned above that detects the position of the light gathered by the lens.