摘要:
In a balanced/unbalanced type coupled FBAR filter (100), an area size of a first lower electrode (102) is generally equal to a total area size of second and third lower electrodes (104, 106) and an area for isolating the second and third lower electrodes (104, 106). An area size of a first upper electrode (103) is generally equal to a total area size of second and third upper electrodes (105, 107) and an area for isolating the second and third upper electrodes (105, 107). The third lower electrode (106) and the second upper electrode (105) are located to face each other, and the third upper electrode (107) and the second lower electrode (104) are located to face each other. A part of the second lower electrode (104) and a part of the second upper electrode (105) are located to face each other.