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公开(公告)号：EP1284925A1
公开(公告)日：2003-02-26
申请号：EP01938068.2
申请日：2001-03-29
申请人： Merck Patent GmbH
IPC分类号： C01B15/013
CPC分类号： B01J20/261 , B01D15/00 , B01J20/26 , B01J41/04 , B01J41/14 , C01B15/013 , C01B15/0135
摘要： The invention relates to a novel chromatographic method for the purification of hydrogen peroxide solutions, which gives highly pure solutions which may be used in semiconductor technology, under the latest stringent purity conditions.
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公开(公告)号：EP1141611B1
公开(公告)日：2003-11-05
申请号：EP99957334.8
申请日：1999-12-02
申请人： MERCK PATENT GmbH
发明人： DUSEMUND, Claus , FREISSLER, Klaus , JAMMER, Wilfried , POTH, Michael , DIX, Alberto , TEMPEL, Eberhard
CPC分类号： F04B9/129 , Y10T137/0396 , Y10T137/2365 , Y10T137/4673
摘要： The invention relates to a pressurised system for conveying liquids without pulsing. The inventive system can be used for highly pure liquid chemicals in the semiconductor industry.
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公开(公告)号：EP1141611A1
公开(公告)日：2001-10-10
申请号：EP99957334.8
申请日：1999-12-02
申请人： MERCK PATENT GmbH
发明人： DUSEMUND, Claus , FREISSLER, Klaus , JAMMER, Wilfried , POTH, Michael , DIX, Alberto , TEMPEL, Eberhard
CPC分类号： F04B9/129 , Y10T137/0396 , Y10T137/2365 , Y10T137/4673
摘要： The invention relates to a pressurised system for conveying liquids without pulsing. The inventive system can be used for highly pure liquid chemicals in the semiconductor industry.
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