专利检索 ap:("MICROSENSORS INC") AND inv:"HSU YING W" 第 1 页

1.

发明公开
ANGULAR RATE SENSOR HAVING A SENSE ELEMENT CONSTRAINED TO MOTION ABOUT A SINGLE AXIS AND FLEXIBLY ATTACHED TO A ROTARY DRIVE MASS 有权
标题翻译：具有测量因素角转速传感器，在单轴有限的运动和灵活的旋转驱动地面安装

公开(公告)号：EP1440321A4

公开(公告)日：2006-04-05

申请号：EP02744347

申请日：2002-06-14

申请人： MICROSENSORS INC

发明人： REEDS JOHN W , HSU YING W

IPC分类号： G01C19/5712

CPC分类号： G01C19/5712

摘要： Micro-gyro (10) has first flexures (27) which extend from anchor (25) which is connected to sense plate (30), where second flexures (37) extend from sense plate (30) to connect drive ring (40), where drive ring (40) is driven to oscillate about a drive axis, where first flexures (27) constrain sense plate (30) from moving about the drive axis but permit sense plate (30) and drive ring (40) to rock about a sense axis, wherein sense plate (30), drive ring (40) and flexures (27, 37) form a plate-ring-flexure system that is tuned to rock about a sense axis in a first or fundamental mode wherein plate (30) and ring (40) move substantially in phase at the lowest resonant frequency.

2.

发明公开
MEMS SENSOR WITH SINGLE CENTRAL ANCHOR AND MOTION-LIMITING CONNECTION GEOMETRY 审中-公开
标题翻译：带单一中心锚与限动连接几何MEMS传感器

公开(公告)号：EP1402275A4

公开(公告)日：2006-06-07

申请号：EP02744453

申请日：2002-06-18

申请人： MICROSENSORS INC

发明人： REEDS JOHN W , HSU YING W , DAO PHU C

IPC分类号： G01C19/5719 , G01P15/125 , G01P15/13

CPC分类号： G01P15/131 , G01C19/5719 , G01P15/125 , G01P2015/0814

摘要： A MEMS sensor (10) which includes a sense element (30) and a single anchor (28) that supports sense element (30) at a central aperture of sense plate (30), wherein anchor (28) uses connection elements or flexures (27) having a geometry that limits the motion of sense element (30) to a single degree-of-freedom, in order to reduce thermal stress.