WAVEFRONT MEASUREMENT DEVICE AND WAVEFRONT MEASUREMENT METHOD

    公开(公告)号:EP4242621A1

    公开(公告)日:2023-09-13

    申请号:EP20965093.6

    申请日:2020-12-10

    IPC分类号: G01M11/02

    摘要: The wavefront measuring apparatus includes: a first lens array to split a radially propagating light beam after being emitted from an optical system to be tested and once forming an image, and then to condense each of the split light beams; a detection unit, disposed at a position where condensing spots of the plurality of split light beams radially propagating from the first lens array are formed, to detect the condensing spots; and a control unit to calculate, when the first lens array is at a position of conjugation with the optical system to be tested, in other words, the position where the images of the optical system to be tested are transferred, a transmitted wavefront of the optical system to be tested from barycenter positions of the condensing spots.