公开(公告)号：EP3851559A1

公开(公告)日：2021-07-21

申请号：EP19880629.1

申请日：2019-08-26

申请人： MITSUBISHI HEAVY INDUSTRIES, LTD.

发明人： IMASAKA, Koji ,  MIKAWA, Hiroaki ,  KAWASAKI, Kohei ,  ISHIGAKI, Mitsuhiro ,  NAGAI, Masahiko ,  TAJIMA, Hidehiko ,  URESHINO, Ayako ,  EGAWA, Kaoru ,  SAKANISHI, Akihiro ,  MIYAZAKI, Taisuke

IPC分类号： C23G3/00 ,  B01D61/44 ,  B01D61/46 ,  B01D61/54 ,  B01D65/10 ,  C23C22/86

摘要： An acidic treatment liquid processing apparatus 10 includes: a tank 11 having an interior space; a diaphragm 12 permeable to a metal cation and separating the interior space of the tank 11 into a first chamber S1 and a second chamber S2; a first electrode 13 disposed in the first chamber S1; a second electrode 14 disposed in the second chamber S2; a power supply 15 configured to apply a voltage while using the first electrode 13 as an anode and the second electrode 14 as a cathode; a first liquid passing part 16 configured to pass an acidic treatment liquid containing a dichromate ion and a metal cation into the first chamber S1; and a second liquid passing part 17 configured to pass an acid aqueous solution into the second chamber S2.