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1.发明公开Thin film capacitor and method of manufacturing the same 无效Dünnschichtkondensator和Herstellungsverfahren。
公开(公告)号：EP0617439A2
公开(公告)日：1994-09-28
申请号：EP94104693.0
申请日：1994-03-24
发明人： Fujii, Eiji , Tomozawa, Atsushi , Torii, Hideo , Hattori, Masumi , Takayama, Ryoichi , Fujii, Satoru
IPC分类号： H01G4/20
CPC分类号： H01G4/20 , H01L2224/4918 , H01L2924/181 , H01L2924/00012
摘要： A NaCl oxide thin layer oriented to (100) face or a spinel oxide thin layer oriented to (100) face, a perovskite dielectric thin layer oriented to (100) face and a metal electrode are sequentially laminated on a metal electrode, thus providing a thin film capacitor. Or alternatively, a thin film capacitor is manufactured by sequentially laminating a NaCl oxide thin layer oriented to (100) face or a spinel oxide thin layer oriented to (100) face, a platinum thin layer as a lower electrode oriented to (100) face, a perovskite dielectric thin layer oriented to (100) face and a metal thin layer as an upper electrode on a substrate. A plasma-enhanced CVD method is applied to form a NaCl oxide thin layer, a spinel oxide thin layer and a perovskite dielectric thin layer while a vacuum deposition method, a sputtering method, a CVD method or a plasma-enhanced CVD method is applied for the formation of a metal electrode.
摘要翻译： 取向为（100）面的NaCl氧化物薄层或朝向（100）面的尖晶石氧化物薄层，朝向（100）面的钙钛矿电介质薄层和金属电极依次层压在金属电极上，从而提供 薄膜电容器。 或者，通过依次层叠取向于（100）面的氧化锌薄膜或朝向（100）面取向的尖晶石氧化物薄层，将铂薄层作为朝向（100）面的下电极而制造薄膜电容器 取向为（100）面的钙钛矿电介质薄层和在基板上作为上部电极的金属薄层。 应用等离子体增强CVD法来形成NaCl氧化物薄层，尖晶石氧化物薄层和钙钛矿电介质薄层，同时将真空沉积法，溅射法，CVD法或等离子体增强CVD法应用于 形成金属电极。
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2.发明公开Thin film sensor element and method of manufacturing the same 失效Dünnfilm-Sensorelement sowie Verfahren zu seiner Herstellung
公开(公告)号：EP0667532A2
公开(公告)日：1995-08-16
申请号：EP95100861.4
申请日：1995-01-23
发明人： Torii, Hideo , Kamada, Takeshi , Hayashi, Shigenori , Takayama, Ryoichi , Hirao, Takashi , Hattori, Masumi
CPC分类号： G01P15/0922 , G01P15/0802 , H01L41/0478 , H01L41/0815 , H01L41/313 , Y10T29/42 , Y10T29/4981
摘要： A thin film sensor element includes a sensor holding substrate having an opening part and a multilayer film adhered thereon at least consisting of an electrode film A, an electrode film B having (100) plane orientation, and a piezoelectic dielectric oxide film present between the electrode film A and the electrode film B. As a result, a thin film sensor element which is small, light, highly accurate, and inexpensive can be attained which can be used for an acceleration sensor element and a pyroelectric infrared sensor element.
On the surface of a flat plate KBr substrate 1, a rock-salt crystal structure oxide of a conductive NiO 12 is formed by a plasma MOCVD method whose vertical direction is crystal-oriented to (100) direction against the substrate surface. By means of a sputtering method, a PZT film 4 is formed by an epitaxial growth on that surface, and a Ni-Cr electrode film 15 is formed thereon. Next, the multilayer film structure is reversed and adhered to a sensor substrate 7 having an opening part with an adhesive 20. After a connection electrode 19 is connected, the whole structure is washed with water, thereby removing the KBr substrate 1.摘要翻译： 薄膜传感器元件包括：传感器保持基板，其具有至少由电极膜A，具有（100）面取向的电极膜B和存在于电极之间的压电介电氧化物膜组成的开口部分和多层膜; 膜A和电极膜B.结果，可以获得可用于加速度传感器元件和热电型红外线传感器元件的小，轻，高精度和便宜的薄膜传感器元件。 在平板KBr衬底1的表面上，导电NiO 12的岩盐晶体结构氧化物通过等离子体MOCVD方法形成，其垂直方向是晶体取向为＆lt; Lang＆100＆Rang＆amp;反对衬底表面的方向。 通过溅射法，在该表面上通过外延生长形成PZT膜4，在其上形成Ni-Cr电极膜15。 接下来，将多层膜结构反转并粘附到具有开口部的粘合剂20的传感器基板7.连接电极19连接后，将整个结构用水洗涤，从而除去KBr基板1。
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3.发明公开A magnetic recording medium and its manufacturing process 失效MagnetischerAufzeichnungsträgerund sein Herstellungsverfahren。
公开(公告)号：EP0461834A2
公开(公告)日：1991-12-18
申请号：EP91305202.3
申请日：1991-06-10
CPC分类号： G11B5/667 , G11B5/725 , G11B5/7325 , G11B5/738 , Y10S428/90
摘要： A magnetic recording medium, comprising; a 2-layer film formed on a glass disk substrate as an under layer composed of an amorphous oxide or NaCl oxides like a NiO or CoO and the like, or any soft magnetic oxide of Mn-Zn ferrite, Ni-Zn ferrite and the like, or a combination of those 2 materials; a magnetic recording medium formed thereon composed of a Co ferrite perpendicular magnetic film of a columnar structure; and a structure formed thereon with a lubricant layer medium. This magnetic recording medium is used for a magnetic rigid disk apparatus. The substrate is made by press-molding the glass plate at a high temperature. The under layer film and Co ferrite film are composed of vapors of organic material compounds and oxygen as their raw materials, and made by a plasma assisted CVD method.
摘要翻译： 一种磁记录介质，包括： 形成在作为由NiO或CoO等的无定形氧化物或NaCl的氧化物构成的下层的玻璃盘基板上形成的2层膜，或者Mn-Zn铁氧体，Ni-Zn铁氧体等的任何软磁性氧化物 ，或这两种材料的组合; 形成在其上的磁记录介质，由柱状结构的Co铁氧体垂直磁性膜构成; 以及在其上形成有润滑剂层介质的结构。 该磁记录介质用于磁性刚性盘装置。 基板通过在高温下对玻璃板进行压制而制成。 底层膜和Co铁氧体膜由有机材料化合物的蒸气和氧气作为原料组成，并通过等离子体辅助CVD法制成。
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公开(公告)号：EP0461834A3
公开(公告)日：1994-01-19
申请号：EP91305202.3
申请日：1991-06-10
CPC分类号： G11B5/667 , G11B5/725 , G11B5/7325 , G11B5/738 , Y10S428/90
摘要： A magnetic recording medium, comprising; a 2-layer film formed on a glass disk substrate as an under layer composed of an amorphous oxide or NaCl oxides like a NiO or CoO and the like, or any soft magnetic oxide of Mn-Zn ferrite, Ni-Zn ferrite and the like, or a combination of those 2 materials; a magnetic recording medium formed thereon composed of a Co ferrite perpendicular magnetic film of a columnar structure; and a structure formed thereon with a lubricant layer medium. This magnetic recording medium is used for a magnetic rigid disk apparatus. The substrate is made by press-molding the glass plate at a high temperature. The under layer film and Co ferrite film are composed of vapors of organic material compounds and oxygen as their raw materials, and made by a plasma assisted CVD method.
摘要翻译： 一种磁记录介质，包括： 作为由非晶氧化物或NaCl氧化物如NiO或CoO等构成的下层的玻璃盘衬底上形成的双层膜，或任何Mn-Zn铁氧体，Ni-Zn铁氧体等的软磁氧化物 ，或这两种材料的组合; 在其上形成的磁记录介质，其由柱状结构的Co铁氧体垂直磁膜组成; 以及在其上形成有润滑层介质的结构。 该磁记录介质用于磁性硬盘装置。 基板通过在高温下对玻璃板进行压制成型而制成。 下层膜和Co铁氧体膜是由有机材料化合物蒸气和氧气作为原料，并且通过等离子辅助CVD法制成。
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公开(公告)号：EP0479547A3
公开(公告)日：1993-03-17
申请号：EP91308970.2
申请日：1991-10-01
IPC分类号： G11B5/55
CPC分类号： G11B5/59677 , G11B5/82
摘要： A rigid disk includes a transparent glass substrate having guide grooves for a laser beam for an optical disk which grooves are formed in one surface of the substrate, a reflective film formed on the lower surface of the substrate, a light-transmitting magnetic oxide film formed on the other surface of the substrate which is flat and smooth, and a lubricating layer formed on the magnetic oxide film. The magnetic oxide film has only a spinel-type crystal structure, and contains iron and cobalt. A magnetic head and an optical head are mounted on an arm movable back and forth relative to the rigid disk in a radial direction of the rigid disk. A laser beam emitted from the optical head passes through the lubricating layer, the magnetic oxide film and the substrate of the rigid disk, and is reflected by the reflective film to be returned to the optical head, thereby detecting a track signal formed by a configuration of the grooves by the optical head, so that the driving of the arm is controlled so as to move the magnetic head along a track on a recording surface of the rigid disk in a servo-controlled manner.
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6.发明公开Rigid disk and signal recording and reproducing method using same 失效Festplatte和seine Aufzeichnungs-和Wiedergabemethode。
公开(公告)号：EP0479547A2
公开(公告)日：1992-04-08
申请号：EP91308970.2
申请日：1991-10-01
IPC分类号： G11B5/55
CPC分类号： G11B5/59677 , G11B5/82
摘要： A rigid disk includes a transparent glass substrate having guide grooves for a laser beam for an optical disk which grooves are formed in one surface of the substrate, a reflective film formed on the lower surface of the substrate, a light-transmitting magnetic oxide film formed on the other surface of the substrate which is flat and smooth, and a lubricating layer formed on the magnetic oxide film. The magnetic oxide film has only a spinel-type crystal structure, and contains iron and cobalt. A magnetic head and an optical head are mounted on an arm movable back and forth relative to the rigid disk in a radial direction of the rigid disk. A laser beam emitted from the optical head passes through the lubricating layer, the magnetic oxide film and the substrate of the rigid disk, and is reflected by the reflective film to be returned to the optical head, thereby detecting a track signal formed by a configuration of the grooves by the optical head, so that the driving of the arm is controlled so as to move the magnetic head along a track on a recording surface of the rigid disk in a servo-controlled manner.
摘要翻译： 刚性盘包括透明玻璃基板，其具有用于光盘激光束的引导槽，该基板的一个表面中形成有槽，在基板的下表面上形成的反射膜，形成有透光性的氧化物膜 在平坦光滑的基板的另一个表面上，以及形成在该磁性氧化膜上的润滑层。 磁性氧化膜仅具有尖晶石型晶体结构，并含有铁和钴。 磁头和光学头安装在可在刚性盘的径向方向上相对于刚性盘来回移动的臂上。 从光头发射的激光束通过润滑层，磁性氧化膜和刚性盘的基板，被反射膜反射回到光头，从而检测由配置形成的轨迹信号 通过光头来控制凹槽，从而控制臂的驱动，以便以伺服控制的方式沿着刚性盘的记录表面上的轨道移动磁头。
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公开(公告)号：EP0667532B1
公开(公告)日：2003-11-26
申请号：EP95100861.4
申请日：1995-01-23
发明人： Torii, Hideo , Kamada, Takeshi , Hayashi, Shigenori , Takayama, Ryoichi , Hirao, Takashi , Hattori, Masumi
CPC分类号： G01P15/0922 , G01P15/0802 , H01L41/0478 , H01L41/0815 , H01L41/313 , Y10T29/42 , Y10T29/4981
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公开(公告)号：EP0617439A3
公开(公告)日：1997-10-15
申请号：EP94104693.0
申请日：1994-03-24
发明人： Fujii, Eiji , Tomozawa, Atsushi , Torii, Hideo , Hattori, Masumi , Takayama, Ryoichi , Fujii, Satoru
IPC分类号： H01G4/20
CPC分类号： H01G4/20 , H01L2224/4918 , H01L2924/181 , H01L2924/00012
摘要： A NaCl oxide thin layer oriented to (100) face or a spinel oxide thin layer oriented to (100) face, a perovskite dielectric thin layer oriented to (100) face and a metal electrode are sequentially laminated on a metal electrode, thus providing a thin film capacitor. Or alternatively, a thin film capacitor is manufactured by sequentially laminating a NaCl oxide thin layer oriented to (100) face or a spinel oxide thin layer oriented to (100) face, a platinum thin layer as a lower electrode oriented to (100) face, a perovskite dielectric thin layer oriented to (100) face and a metal thin layer as an upper electrode on a substrate. A plasma-enhanced CVD method is applied to form a NaCl oxide thin layer, a spinel oxide thin layer and a perovskite dielectric thin layer while a vacuum deposition method, a sputtering method, a CVD method or a plasma-enhanced CVD method is applied for the formation of a metal electrode.
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公开(公告)号：EP0617440B1
公开(公告)日：1997-03-05
申请号：EP94104369.7
申请日：1994-03-19
发明人： Tomozawa, Atsushi , Fujii, Eiji , Torii, Hideo , Hattori, Masumi , Fujii, Satoru , Takayama, Ryoichi
IPC分类号： H01G4/30
CPC分类号： H01G4/306
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公开(公告)号：EP0012002A1
公开(公告)日：1980-06-11
申请号：EP79302692.3
申请日：1979-11-26
发明人： Hattori, Masumi , Ishida, Toru , Tanaka, Shinichi
CPC分类号： H01B1/14 , C03C3/097 , C03C8/02 , C03C8/14 , H01C17/0656
摘要： The compositions comprise 95 to 50% by weight of a glass frit (preferably of a barium borate glass which advan- tageouslycontains niobium oxide) and 5 to 50% by weight of a mixture comprising molybdenum disilicide, tantalum disilicide, magnesium silicide and aluminium. The amount of aluminium is such that the molar ratio of the silicides to aluminium is 90:10 to 50:50. The inclusion of aluminium increases the range of resistivity obtainable.
摘要翻译： 组合物包含95至50重量％的玻璃料（优选硼酸钡玻璃，优选含有氧化铌）和5至50重量％的包含二硅化钼，二硅化钽，硅化镁和铝的混合物。 铝的量使得硅化物与铝的摩尔比为90:10至50:50。 包含铝增加了可获得的电阻率范围。
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