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    HIGH RESOLUTION FULL MATERIAL FRESNEL ZONE PLATE ARRAY AND PROCESS FOR ITS FABRICATION
    2.
    发明公开
    HIGH RESOLUTION FULL MATERIAL FRESNEL ZONE PLATE ARRAY AND PROCESS FOR ITS FABRICATION 审中-公开
    高分辨率全材质FRESNEL ZONE PLATE ARRAY及其制作工艺

    公开(公告)号：EP3282294A1

    公开(公告)日：2018-02-14

    申请号：EP17161526.3

    申请日：2017-03-17

    申请人： Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.

    发明人： Sanli, Umut, Tunca ,  Keskinbora, Kahraman ,  Schütz, Gisela

    IPC分类号： G02B5/18 ,  C23C16/455

    摘要： The invention relates to a high resolution full material Fresnel Zone Plate array comprising a plurality of full material Fresnel Zone Plates on a common carrier, a method for producing a full material Fresnel Zone Plate precursor array by providing a common carrier comprising a plurality of micro-pillars and deposition of alternating layers of at least two different materials onto at least some of the micro-pillars and an apparatus for producing high resolution full material Fresnel Zone Plate (FZP) arrays. The apparatus for producing a full material Fresnel Zone Plate arrays, comprises a first device for providing a plurality of micro-pillars in a common carrier, a deposition device which applies alternating layers of at least two different materials onto at least some of the micro-pillars arranged on the common carrier and a slicing device which slices a full material Fresnel Zone Plate out of a pillar.

    摘要翻译： 本发明涉及一种高分辨率全材料菲涅耳区域板阵列，其包括在共同载体上的多个全材料菲涅耳区域板，一种用于通过提供包括多个微孔板的共同载体来生产全材料菲涅耳区域板前体阵列的方法， 支柱和至少一些微柱上的至少两种不同材料的交替层的沉积以及用于生产高分辨率全材料菲涅耳区域板（FZP）阵列的装置。 用于制造全材料菲涅耳区域板阵列的设备包括用于在共同载体中提供多个微柱的第一装置，将至少两种不同材料的交替层施加到至少一些微型柱上的沉积装置， 布置在共同载体上的支柱和将全材料菲涅耳区域板从支柱切割出来的切片装置。