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公开(公告)号:EP2422225B1
公开(公告)日:2015-07-22
申请号:EP10767737.9
申请日:2010-04-21
IPC分类号: G01W1/08 , G01W1/02 , G01B9/02 , G01N21/45 , G01N21/53 , G01N21/47 , G01N21/17 , G01P5/26 , G01S17/95 , G01S17/58 , G01K11/30 , G01S7/481
CPC分类号: G01W1/02 , G01K11/006 , G01K11/30 , G01N21/538 , G01N2021/1793 , G01N2021/4709 , G01P5/26 , G01S7/4816 , G01S17/003 , G01S17/58 , G01S17/95 , Y02A90/19
摘要: A fringe pattern from an interferometer is imaged onto a digital micromirror device containing an array of micromirrors in an associated pattern of pixel mirror rotational states that provide for sampling the circular fringe pattern in cooperation with one or more associated photodetectors, so as to provide for generate a corresponding set of associated complementary signals. A plurality of different sets of associated complementary signals generated for a corresponding plurality of mutually independent associated patterns of pixel mirror rotational states are used to determine at least one metric associated with the circular fringe pattern.
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公开(公告)号:EP2422225A2
公开(公告)日:2012-02-29
申请号:EP10767737.9
申请日:2010-04-21
CPC分类号: G01W1/02 , G01K11/006 , G01K11/30 , G01N21/538 , G01N2021/1793 , G01N2021/4709 , G01P5/26 , G01S7/4816 , G01S17/003 , G01S17/58 , G01S17/95 , Y02A90/19
摘要: A fringe pattern from an interferometer is imaged onto a digital micromirror device containing an array of micromirrors in an associated pattern of pixel mirror rotational states that provide for sampling the circular fringe pattern in cooperation with one or more associated photodetectors, so as to provide for generate a corresponding set of associated complementary signals. A plurality of different sets of associated complementary signals generated for a corresponding plurality of mutually independent associated patterns of pixel mirror rotational states are used to determine at least one metric associated with the circular fringe pattern.
摘要翻译: 来自干涉仪的条纹图案被成像到数字微镜器件上,该数字微镜器件包含像素反射镜旋转状态的相关图案中的微反射镜阵列,所述像素反射镜旋转状态的相关图案与一个或多个相关联的光电检测器协作来提供圆形条纹图案的采样, 相应的一组相关的互补信号。 使用为对应的多个相互独立的相关图案的像素反射镜旋转状态而生成的多个不同组相关互补信号来确定与圆形条纹图案相关联的至少一个度量。
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