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公开(公告)号:EP4032119A1
公开(公告)日:2022-07-27
申请号:EP19769791.5
申请日:2019-09-16
发明人: RAJPALKE, Mohana Krishnappa , SCHRÖTER, Niels Bernhard , D'ANNA, Nicolò , AEPPLI, Gabriel , BACHELLIER, Nicolas Pierre Michel , KROGSTRUP JEPPESEN, Peter
IPC分类号: H01L21/36